JPH028030U - - Google Patents
Info
- Publication number
- JPH028030U JPH028030U JP8425988U JP8425988U JPH028030U JP H028030 U JPH028030 U JP H028030U JP 8425988 U JP8425988 U JP 8425988U JP 8425988 U JP8425988 U JP 8425988U JP H028030 U JPH028030 U JP H028030U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer holding
- holding jig
- semiconductor manufacturing
- manufacturing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8425988U JPH028030U (en]) | 1988-06-24 | 1988-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8425988U JPH028030U (en]) | 1988-06-24 | 1988-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH028030U true JPH028030U (en]) | 1990-01-18 |
Family
ID=31308956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8425988U Pending JPH028030U (en]) | 1988-06-24 | 1988-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH028030U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970030251A (ko) * | 1995-11-30 | 1997-06-26 | 김광호 | 반도체장치 제조용 확산로의 배플 |
-
1988
- 1988-06-24 JP JP8425988U patent/JPH028030U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970030251A (ko) * | 1995-11-30 | 1997-06-26 | 김광호 | 반도체장치 제조용 확산로의 배플 |